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Analysis of Capacitive Microelectromechanical System Accelerometer Proposed with Voltage Reference in Read-Out Circuit

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Title: Analysis of Capacitive Microelectromechanical System Accelerometer Proposed with Voltage Reference in Read-Out Circuit

Authors: M.A. Miskam, O. Sidek, A.Z. Ruhaifi

Journal: Journal of Applied Sciences

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Publisher: Asian Network for Scientific Information (ANSInet)

Country: Pakistan

Year: 2009

Volume: 9

Issue: 9

Language: English

DOI: 10.3923/jas.2009.1658.1667

Keywords: MEMSmicromachined sensorsmicroaccelerometersilicon sensorsinertial sensors

Categories
Microelectromechanical Systems (5) Electrical Engineering (5972) Electronics (349) Mechanical Engineering (4477) Materials Science (8025)

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