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Abstract

In this investigation, TiO2 and Ag based single and multilayer-films were deposited on microscope glass slides with varying individual layer thicknesses by radio-frequency reactive magnetron sputtering. Prior to multilayer development, single layers of Ag and TiO2 were deposited and characterized. All the films were prepared at an elevated pressure of 3 Pa at room temperature. It was found that single layer of TiO2 showed anatase polycrystalline structure. It also exhibited high visible transmittance of above 80% and higher refractive index of 2.31 at a wavelength of 550 nm. The indirect optical band gap of the TiO2 films was estimated as 3.39 eV. The Ag single layer films were found to be crystalline with a very high reflectance for IR (Infra-red) light. Finally, the multi-layers have been deposited and characterized by X-ray diffraction, UV-visible-NIR spectro-photometry, scanning electron microscopy and Auger electron spectroscopy.