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Abstract

Nano-electromechanical systems (NEMS) sensors are recently used as powerful medical detectors for detection of disease. In this research paper, the modified couple stress non-classic continuum theory is applied to examine the size effect on the pull-in instability of beam-type NEMS sensor at submicron separations considering the van der Waals attraction. The proposed model takes the non-classic support conditions into account using rotational springs at supported end of the simply supported nano-beam. In order to solve the nonlinear constitutive equation of the nano-beams, finite difference numerical solution employed. The results reveal significant influence of the size dependency, elastic support conditions and van der Waals attraction on the pull-in characteristics of beam-type NEMS.