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Abstract

A novel MEMS based Electro thermal Gripper is proposed in this paper, the gripper tool proposed in this paper is designed to handle the micro objects of about 100-150 microns. The gripper tool proposed in this article is materialized with Nickel Alloy of UNS NO4400. The material proposed for the Gripper has better heat resistant characteristics and can with stand the high potential applications. The gripper designed is working on the basics of Pull actuation method from the middle hinge part due to the applied potential. The gripper tool is actuated for an applied potential of about less than 2 volts and mode shape response of the gripper was analyzed under Dynamic frequency. Comparative analyses also carried out between the different Gradients of Aluminum and Nickel alloys and applied potential. The yield point criteria analyses have been presented for the gripper with various Gradient of Aluminum and Nickel Alloys. The entire TEM analyses of the gripper tool are carried out with COMSOL multiphysics software.