DefinePK

Abstract

This paper presents a design of noninvasive capacitive pressure sensor using micro electromechanical system (MEMS) for the measurement of Intraocular pressure (IOP). The normal IOP of a human eye ranges from 12mmHg to 20mmHg. IOP is the important factor in the diagnosis of glaucoma. The corneal curvature of eye changes with the change in IOP. Thus the IOP can be measured by measuring the variation in the corneal curvature. Since it is going to be used for human eye, it has to measure the pressure of range 5-40 mmHg. The sensor consists of a poly silicon layer which gets deflected when pressure is applied. This simulation is done in COMSOL software and it gives good sensitivity and linearity in the IOP range. Here, the changes in the sensitivity according to the number of perforations has been shown. The transfer of sensed information is often achieved through a wireless interface established between transmission/reception antennas of the involved parts.