DefinePK

Abstract

Pressure measurements in industries, biomedical and marine environment are of utmost importance to better understand the process stability, ocean processes. The influence of in-plane stresses of silicon plate with square, rectangular and circular shape have been investigated. The area of square ,rectangular and circular form of elastic element has been approximated to be equal and the thickness is about 1μm. It was shown, that in-plane stresses can have a great influence on plate deflection and stresses distributions that should be taken into account at designing of piezoresistive pressure sensors. Finite element method (FEM) is adopted to optimize the sensor parameters, such as the membrane shape the deflection and stress caused by the different elastic membrane was analysised to achieve higher sensitivity, larger full scale span and linearity.