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Abstract

This paper presented the study of Micro-Electro-Mechanical System (MEMS) structures characterization on poly (methyl methacrylate) (PMMA) layer by using the 248nm Krypton Fluoride (KrF) excimer laser micromachining. To study surface quality of PMMA, the micro drilling process was carried out to produce the holes. By using the KrF excimer laser, the relationship between the ablation parameter and the size of the holes was investigated. To further confirm the relationship between ablation parameters and the surface quality, several micro channels of the micro fluidic structures were fabricated by varying the energy and frequency in order to obtain the optimize parameters. The width of the micro channels increased when the energy increased. After the micromachining process, the micro channels were fabricated again by different beam size. The increment in beam size caused the width of the micro channel to be increased. The physical deformation of the holes and the micro channel were observed by using the High Power Optical Microscope.