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Title: The effects of annealing temperature on properties of aluminium-doped tin oxide (al/sno2) thin films deposited by spray pyrolysis deposition (SPD) method
Authors: Fatin Izyani Mohd Fazli, Ahmad Naim Suhaimi, Noor Sakinah Khalid, Noor Kamalia Abd Hamed, Muhammad Luqman Mohd Napi, Salina Mohammad Mokhtar, Ng Kim Seng, Nurfarina Zainal, Nafarizal Nayan, Soon Chin Fhong, A. B. Suriani, Mohd Khairul Ahmad
Journal: ARPN Journal of Engineering and Applied Sciences
Publisher: Khyber Medical College, Peshawar
Country: Pakistan
Year: 2016
Volume: 11
Issue: 14
Language: English
The effects of annealing temperature on properties of aluminium-doped tin oxide (ATO) thin films deposited by spray pyrolysis deposition (SPD) method were studied. Transparent sandwich structure ATO multilayered thin films were deposited on glass substrates from aluminium nitrate and tin (IV) chloride solution using spray pyrolysis deposition method. The deposited films were annealed at different temperatures using a furnace from 100oC to 500oC. Characterization of the films for its surface morphology, elemental analysis and optical properties were done by using FE-SEM, EDS and UV-Visible spectroscopy (UV-Vis). Sample of 500?C annealing temperature was the optimum annealing temperature since the sample exhibited the lowest resistivity of 493.44 O • cm and highest percentage of transparency.
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