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Abstract

The cobalt doped tin oxide thin film was fabricated by using the mixture of cobalt (II) chloride and tin (IV) chloride. It was fabricated on microscopic glass using spray pyrolysis deposition technique. The samples were annealed with different annealing time at 300ºC. The duration of annealing time is 1, 2, 3, 4 and 5 hours. The samples were then characterized by energy dispersive X-ray spectroscopy (EDX), field-emission scanning electron microscopy (FESEM), ultraviolet visible spectrophotometer (UV-vis) and four-point probe. The FESEM results indicate that as the annealing time duration increased, the crack pattern on the surface of the samples increased. The optical properties of the samples were studied with the UV-vis results show the transmittance of all sample were between 70% to 80%. The sheet resistance for IV-characteristic increased when annealing time increased. The lowest resistivity was achieved at 2 hours annealing time.