DefinePK

Abstract

This paper proposed the design and implementation of 1µbar resolution pressure measurement ASIC (Application Specific Integrated Circuit) processing circuit for MEMS capacitive pressure sensor using FPAA (Field Programmable Analog Array) and FPGA (Field Programmable Gate Array). ASIC is designed to measure a pressure from altimeter for the range of pressure from -100 mbar to 900 mbar. It has analog signal processing circuit and digital processing circuit, and its prototype is implemented in FPAA and FPGA respectively. Capacitance to Voltage (C-V) and Capacitance to Frequency (C-F) conversion techniques are used to measure the change in capacitance from MEMS pressure sensor. Simulation of the circuit is carried out in Anadigm tool and Xilinx v6.1. Prototype ASIC model is implementation is carried our using AN231E04 (FPAA) and Xilinx Spartan 3AN (FPGA). The implementation result shows 309 mV/pF and 35 kHz/pF sensitivity for C-V and C-F technique respectively. The frequency from C-F is computed in FPGA, and measured pressure is displayed in mbar with 1µbar resolution.