DefinePK

Abstract

In this paper, parametric analysis of miniature on-chip 3-D inductor is presented. The effect of conductor width, spacing between conductors and number of turns of inductor on Quality factor (Q-factor), inductance and Self-resonant frequency (SRF) are studied. Improvement in percentage increase of Q-factor is due to increase in conductor width. It can be found that ~72% of on-chip area reduction is observed when compared with conventional inductor design. Effective Q-factor and inductance are to be verified experimentally through dynamic variation of different parameters over the desired frequency range. The dimension of inductor considered for analysis is 100 µm ×100 µm, suitable for improved inductor design in high frequency RF circuits.