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Detection of volatile organic compounds using MEMS based microcantilever: A review

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Title: Detection of volatile organic compounds using MEMS based microcantilever: A review

Authors: CH. Jaya Prakash, N. Siddaiah

Journal: ARPN Journal of Engineering and Applied Sciences

HEC Recognition History
Category From To
Y 2023-07-01 2024-09-30
Y 2022-07-01 2023-06-30
Y 2021-07-01 2022-06-30
X 2020-07-01 2021-06-30

Publisher: Khyber Medical College, Peshawar

Country: Pakistan

Year: 2021

Volume: 16

Issue: 1

Language: English

Categories
MEMS (16) Volatile Organic Compounds (VOCs) (1) Microcantilevers (1) Sensor Technology (69) Review (431)

Abstract

This survey presents a literature review of metal oxide-based volatile organic compounds (VOC) sensor detection and cantilever based sensors for the checking and recognition of unpredictable natural mixes. the study contains data gave by various partners and writing concentrated on recognition of VOC gases like n-octane, toluene & n-butanone, Ethanol, Acetone, Pentaerythritol, tetra nitrate & 2,4,6-Trinitrotoluene with sensitivities, the limit of detection was presented. Parameters like resonant frequencies, quality factor and deflection properties of length versus width are measured for different MEMS cantilever structures.

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