DefinePK

Abstract

In this research we reported a very simple and innovative method to manufacture a novel type of micro-injector system (MIS) inside nanoporous anodic aluminum Oxide (AAO) membrane. Nowadays these micro and nano combined structure gain attention in medical and biological applications. This fabricated micro nano structure consists of a thin film of anodic aluminum oxide having 50-100μm wider and 12μm deeper channels. These channels are used for fluid flow on micro scale. These channels are connected with a nozzle like microchannel which can perform fluid injection function.  Fabrication process is mainly based on photolithography and wet chemical etching technique.  Wet chemical etching takes place in 5 wt% of phosphoric acid solution. Dimensions and the shape of these microchannels depend solely on anodization and etching conditions. This study provides a low cost fabricated micro-nano combined structure which could be further used in different types of microfluidic devices and enable the device to perform the function of injection, filtration and purification.